3D nanolithography with metalens arrays and spatially adaptive illumination - Nature

1. 3D nanolithography with metalens arrays and spatially adaptive illumination  Nature
2. Metalenses Improve Microscopic 3D Printing Precision  IEEE Spectrum
3. LLNL team hits 1,000x speed boost in 3D nanofabrication  R&D World
4. Researchers Develop Method Using Metalens Arrays for Precise 3D Nanolithography  geneonline.com
5. LLNL Researchers Break Speed and Scale Barriers in 3D Nanofabrication with New Meta-Optics Platform | Newswise  Newswise